Fundamental Principles of Engineering Nanometrology

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Fundamental Principles of Engineering Nanometrology,

Edition 1

Editors: By Richard Leach

Publication Date: 25 Sep 2009

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Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Key Features

Provides a basic introduction to measurement and instruments
Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

About the author

By Richard Leach, National Physical Laboratory, UK

1. Introduction to metrology for micro- and nanotechnology
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units

ISBN: 9780080964546

Page Count: 352

Retail Price (USD) :

Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

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