Fundamental Principles of Engineering Nanometrology,
Edition 1
By Richard Leach
Publication Date:
25 Sep 2009
Description
Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.
Key Features
- Provides a basic introduction to measurement and instruments
- Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
- Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal, variable focus, and scattering instruments)
- Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
- Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge
About the author
By Richard Leach, National Physical Laboratory, UK
Table of Contents
1. Introduction to metrology for micro- and nanotechnology
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units
2. Some basics of measurement
3. Precision measurement instrumentation - some design principles
4. Length traceability using interferometry
5. Displacement measurement
6. Surface topography measurement instrumentation
7. Scanning probe and particle beam microscopy
8. Surface topography characterisation
9. Co-ordinate metrology
10. Mass and force measurement
References
Appendix A SI units of measurement and their realisation at NPL
Appendix B SI derived units
Book details
ISBN:
9780080964546
Page Count: 352
Retail Price
:
£121.00
Audience
Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers
